Particle Deposition System SST-1200

Particle Deposition System SST-1200 - Specifications

SPECIFICATIONS
  • Sphere Size Range:PSL Sphere diameters of < 0.10 um to 4.0 um
  • Substrate Sizes:100, 125, 150, 200 and 300mm round wafers.
  • Deposition Time: Variable, user selectable.
  • Wafer to Wafer Repeatability: < 7 % after setup.
  • Clean/Purge Time:Average time 30 seconds into HEPA exhaust filter.
  • Agglomerated Spheres:Multiplets < 2%, measured by surface particle counter, ESTEK-WIS-8500. Reference material is Duke Scientific, Inc Surf-Cal brand spheres.
  • Warranty:1 year parts and labor.
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