Tencor Flexus 2320 Dual Wave Length Thin Film Stress System
SPECIFICATIONS
- Dual Wave length tool
- Remanufactured, fully operational with Calibration Data Test Package
- Capable of scanning 75 mm-200mm wafers with optional plates
- 200 mm plate is included
- Scanning diode laser source.
- Hot plate option - up to 500 degrees
- Printer
- Computer, Color monitor, hard drive backup, Windows 98
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