Tencor Surfscan

Operations

MISC

228230
Puck Assembly - for 6100,62x0
339830
Puck Assembly - for 6400 series
4500 reset switch
Reset Switch for SFS4500 tool
Blower Box
Blower Box for SFS6200
R980
PMT for SFS6200

BOARDS

054453 Assembly
TENCOR Vacuum Handler Board with fully refurbished assembly.
016420
Tencor Memory Board
0069282-000
Analog PCB - for 6420
187151
Below Wafer Detector PCB - for 6100,6200,6220
318809
Below Wafer Detector PCB - for 6400, 6420
238740
GPIO PBC
509469
Haze Separator PCB - for 6100,6200,6400
357464
Haze Separator PCB - for 6220,6420
198331
4 Channel Motor Controller PCB
163996
Motor Distribution
533645
4 Channel Power Motor Driver
164453
Particle/Area Processor PCB - for 6100,6200,6400
273163
Particle/Area Processor PCB - for 6220,6420
177415
PMT Preamp - for 6100,6200,6220
272935
PMT Preamp - for 6400,6420
345253
Timing Generator PCB - for 6100,6200,6400
277266
Timing Generator PCB - for 6220,6420
531430
Analog NAT IC PCB - for 6100,6200,6220,6400

POWER SUPPLY

219398
PS4 Power Supply

LASERS

1103P-0613
Laser for 4000,4500,5000
130028
Laser for 5500,6100
2214-30SLQT
Argon Laser for 6200,6220,6400,6420

LASER POWER SUPPLY

05-LPM-901-050
Laser power supply for 4000,4500,5000
05-LPM-902-065
Laser power supply for 5500,6100
9470-02
Laser power supply