Tencor Surfscan

Operations

BOARDS

054453 Assembly
TENCOR Vacuum Handler Board with fully refurbished assembly.
016420
Tencor Memory Board
318809
Below Wafer Detector PCB - for 6400, 6420
238740
GPIO PBC
509469
Haze Separator PCB - for 6100,6200,6400
357464
Haze Separator PCB - for 6220,6420
198331
4 Channel Motor Controller PCB
163996
Motor Distribution
533645
4 Channel Power Motor Driver
164453
Particle/Area Processor PCB - for 6100,6200,6400
273163
Particle/Area Processor PCB - for 6220,6420
177415
PMT Preamp - for 6100,6200,6220
272935
PMT Preamp - for 6400,6420
345253
Timing Generator PCB - for 6100,6200,6400
277266
Timing Generator PCB - for 6220,6420
531430
Analog NAT IC PCB - for 6100,6200,6220,6400
0069282-000
Analog PCB - for 6420
187151
Below Wafer Detector PCB - for 6100,6200,6220

MISC

339830
Puck Assembly - for 6400 series
4500 reset switch
Reset Switch for SFS4500 tool
Blower Box
Blower Box for SFS6200
R980
PMT for SFS6200
228230
Puck Assembly - for 6100,62x0

POWER SUPPLY

219398
PS4 Power Supply

LASERS

1103P-0613
Laser for 4000,4500,5000
130028
Laser for 5500,6100
2214-30SLQT
Argon Laser for 6200,6220,6400,6420

LASER POWER SUPPLY

05-LPM-901-050
Laser power supply for 4000,4500,5000
05-LPM-902-065
Laser power supply for 5500,6100
9470-02
Laser power supply