Particle Deposition System SST-1200

Particle Deposition System SST-1200 - Technology Overview

OVERVIEW

Particle Deposition System SST-1200 is the only tool in the semiconductor industry that produce the highest quality NIST Traceable and Non-Traceable Latex Sphere Calibration Standards up to 300mm at a low cost.

In the process of production, Polystyrene Latex Spheres (PSL) are deposited on the surface of silicon wafer or other substrates in a highly controlled environment and the end result is the Latex Sphere Calibration Standard that can be used to calibrate any particle counter, including Estek, ADE, Aeronca, KLA Tencor Surfscan or other patterned, or unpatterned wafer inspection equipment.

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