PARTICLE DEPOSITION SYSTEM SST-1200: SPECIFICATIONS

Features and Specifications:

• Sphere Size Range:PSL Sphere diameters of < 0.10 um to 4.0 um
• Substrate Sizes:100, 125, 150, 200 and 300mm round wafers.
• Deposition Time: Variable, user selectable.
• Wafer to Wafer Repeatability: < 7 % after setup.
• Clean/Purge Time:Average time 30 seconds into HEPA exhaust filter.
• Agglomerated Spheres:Multiplets < 2%, measured by surface particle counter, ESTEK-WIS-8500. Reference material is Duke Scientific, Inc Surf-Cal brand spheres.
• Warranty:1 year parts and labor.