Refurbished Nanospec 3000 Film Thickness Measurement System
The NanoSpec 3000 is a low cost, film thickness measurement system that utilizes a modern small spot spectroscopic reflectometer that is built on a simple-to-use tabletop platform.
The rugged, solid state linear diode array provides fast, precise measurements of single-layer films such as oxide, nitride and photoresist, as well as the top layer on film stacks of up to 3 layers in the thickness ranges.
The flexible software platform makes it simple and easy for the user to configure measurement programs and recipes for both simple and advanced measurement applications. With the ability to select film constants, scan ranges and substrate types, the 3000 is the ideal tool for rapid measurement program development.
Data management features include a database, statistical analysis, histograms and the ability to export data files. Both tabular and Cauchy dispersion models are available for use and material files may be imported and exported. Optical constants n and k can be determined with the XMP option.
The NanoSpec 3000PHX Tabletop Film Analysis (Upgrade) System is a cost-effective hardware and software upgrade to existing NanoSpec 174, 180, 200, 210 and 2100 systems that brings the performance level of these products up to that of the NanoSpec 3000 film thickness measurement system. The Phoenix upgrade package delivers a modern small spot spectroscopic reflectometer film thickness measurement system incorporating a solid state linear diode array.
This system provides fast, precise measurements of single-layer films such as oxide, nitride and photoresist, as well as the top layer on film stacks of up to 3 layers in the thickness ranges.
The flexible software platform makes it simple and easy for the user to configure measurement programs and recipes for both simple and advanced measurement applications. Data management features include a database, statistical analysis, histograms and the ability to export data files.
NEWSLETTER SIGNUP
- Nanospec 3000 Quote Request
- Nanometrics Repair, Service, Upgrade Design FAQ
- Nanometrics Training Classes
- Nanometrics: Brumley South Advantage
- Nanospec 210XP Scanning UV Computerized Film Thickness Measurement System
- NanoSpec 6100 Tabletop Film Analysis System
- NanoSpec 8000X and 8000XSE (including Spectroscopic Ellipsometer)
- Nanometrics Nanoline 50-2C CD Measurement System
- Dryden Engineering Q-III Surface Particle Detector
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