NanoSpec 6100 - Parts - Hot Swap & Loaner Systems - Refurbishment - Upgrade Design!
The NanoSpec 6100 is a fast, low cost tabletop film thickness and mapping system that provides a broad range of measurement capabilities for thin film metrology.
The 6100 utilizes non-contact spectroscopic reflectometry to measure sites as small as 10~m in diameter on production wafers. The computerized sample stage coupled to a robust autofocus system enables automatic generation of film thickness uniformity maps.
The system will measure wafer substrates in the size range of 75 to 200mm and photomasks from 5 to 9 inches square.
The 6100 measures film thickness in the range of 200~ - 20~m with the visible light source (400 to 800nm halogen lamp) and 25~ - 20~m with optional UV light source (210 - 400nm deuterium lamp). The upper thickness range can be extended to 70~m with the thick film option. Optical constants n and k can be determined with the XMP option.
A variety of substrates are easily measured and mapped with the motorized, precision x-y sample stage with a resolution of better than 1~m. The high-resolution color graphics display provides contour and 3D film thickness mapping.
NEWSLETTER SIGNUP
- Nanospec 6100 Quote Request
- Nanometrics Repair, Service, Upgrade Design FAQ
- Nanometrics Training Classes
- Nanometrics Parts - Hot Swap & Loaner Systems - Refurbishment - Upgrade Design
- Nanospec 210XP Scanning UV Computerized Film Thickness Measurement System
- NanoSpec 3000 Film Thickness Measurement System
- NanoSpec 8000X and 8000XSE (including Spectroscopic Ellipsometer)
- Nanometrics Nanoline 50-2C CD Measurement System
- Dryden Engineering Q-III Surface Particle Detector
HAVE QUESTIONS
ABOUT THIS TOOL?
Click Here
OR call (704) 664-9251
