LATEX SPHERE CALIBRATION STANDARDS - DEPOSITION CHOICES

Deposition Choices:

• Full Deposition Calibration Standards have Polystyrene Latex Sphere deposited across the entire surface of the wafer. Brumley South, Inc. uses their proprietary Sticky Sphere Technology to guarantee that the PLS's are Non-Clumping and Random in distribution for the Highest Quality Standards available.Calibration Standards for unpatterned inspection tools typically have 1500 to 2000 PLS's deposited and for patterned tools between 10,000 to 15000 PLS's deposited.
• Half Deposition Calibration Standards have Polystyrene Latex Spheres deposited across the half surface of the wafer. They are great for checking size accuracy, orientation problems with the optics and using the clean side of the wafer as a control side.
• With Circle Deposition a silicon wafer has six spot depositions of the same PSL size. Brumley South can provide you with six different sizes, with our custom deposition service, if you need it!
• Double Deposition Calibration Standards have Polystyrene Latex Sphere deposited across the 3/4 surface of the wafer.