Tencor 4000

KLA-Tencor 4000 refurbished wafer inspection system

SPECIFICATIONS
  • Capable of 2"-6" wafers. Set to run 4-5-6 inch wafers.
  • Substrate Thickness: Semi standard thickness.
  • Material Type: In the most sensitive range, any opaque, polished surface that scatters less than 0.25% of incident collimated light averaged over the substrate.
  • High angle optics.
  • Currently configured for 4-5-6 inch wafers, PA-182 Cassettes.
  • Non-patterned surface Inspection System.
  • Defect Sensitivity, 0.360 micron or approximately 0.15 micron squared. Based on 95% capture on silicon PSL Standards.
  • Contamination: No more than 2 particles with scattering cross-section greater than 0.5 micron squared per 50 passes, 96% confidence.
  • Accuracy within 1% measured on a VLSI Relative Standard 1402.
  • Refurbished to OEM specifications.
  • New HeNe laser, 632 nanometer.
  • New Color Monitor.
  • NIST Calibrated.
  • Full Calibration data package.
  • New 80 column Printer.
  • USA Shipping Crate
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