Tencor 4500 Surfscan refurbished wafer inspection system

Tencor 4500 Surfscan refurbished wafer inspection system

SPECIFICATIONS
  • Capable of 2"-6" wafers. Set up for 4-5-6 inch wafers.
  • Substrate Thickness: Semi standard thickness.
  • Material Type: In the most sensitive range, any opaque, polished surface that scatters less than 0.025% of incident collimated light averaged over the substrate.
  • High angle optics.
  • Currently configured for 4-5-6 inch wafers, PA-182 Cassettes.
  • Non-patterned surface Inspection System.
  • Defect Sensitivity, 0.2 micron or approximately 0.015 micron squared. Based on 95% capture on silicon PSL Standards.
  • 0.4 ppm Haze Sensitivity.Contamination: No more than 2
  • particles with scattering cross-section greater than 0.5 micron squared per 50 passes, 96% confidence.
  • Accuracy within 1% measured on a VLSI Relative Standard 1402.
  • Refurbished to OEM specifications.
  • New HeNe laser, 632 nanometer.
  • New Color Monitor.
  • NIST Calibrated.
  • Full Calibration data package.
  • New 80 column Printer.
  • Manuals.
  • USA Shipping Crate.

Refurbished and fully functional to OEM Specifications!

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