
KLA 6100 Surfscan film inspection system refurbished
SPECIFICATIONS
- Capable of 2" -4" or 4" - 8" wafers. (To run 2 - 4 inch, order custom option.)
- Configured for customer cassettes.
- Non-patterned surface Inspection System.
- 0.002 parts per million, Haze Resolution.
- Detection: 0.16 um @ 95% capture rate based on PSL NIST Calibration Standard.
- Accuracy within 2% based on Approved Calibration Standard.
- Refurbished tool.
- Win 98 software, Tencor current software.
- New Color Display Monitor.
- NIST Calibrated to Silicon substrate.
- Full Calibration data package.
- New Data Printer.
- Lock Down accessories.
- Memory, CPU, Hard Drive upgrade.
- Tencor approved blower assembly.
- USA Shipping Crate
- Network ready.
NEWSLETTER SIGNUP
- KLA 6100 Surfscan Quick Quote
- Wafer inspection equipment refurbished, ready for sale
- Rental Plans on selected metrology equipment
- Nanometrics Support - refurbishment, service and parts, loaner systems, and more
- Dryden Engineering Q-III Surface Particle Detector remanufactured
- Kensington Labs robots repair, service & support on all wafer handling equipment, including Sorters
- AlphaStep Problems? Ask our AlphaStep Support Engineer!
- KLA-Tencor P-11 Long Scan Surface Profiler
- NIST traceable Latex Sphere Calibration Standards
- AlphaStep Calibration Standards
HAVE QUESTIONS
ABOUT THIS TOOL?
Click Here
OR call (704) 664-9251





