KLA 6100 SURFSCAN REFURBISHED

Tencor 6100 Surfscan is a non-patterned surface inspection system, capable of 2" -4" or 4" - 8" wafers. Refurbished back to the original OEM specifications. Ready for sale NOW!

System Specifications:

• Capable of 2" -4" or 4" - 8" wafers. (To run 2 - 4 inch, order custom option.)
• Configured for customer cassettes.
• Non-patterned surface Inspection System.
• 0.02 parts per million, Haze Sensitivity on Silicon.
• 0.002 parts per million, Haze Resolution.
• Detection: 0.16 um @ 95% capture rate based on PSL NIST Calibration Standard.
• Accuracy within 2% based on Approved Calibration Standard.
• Refurbished tool.
• Win 98 software, Tencor current software.
• New HENE RED laser, 632.8 nanometer.
• New Color Display Monitor.
• NIST Calibrated to Silicon substrate.
• Full Calibration data package.
• New Data Printer.
• Manuals.
• Lock Down accessories.
• Memory, CPU, Hard Drive upgrade.
• Tencor approved blower assembly.
• USA Shipping Crate