KLA 6100 Surfscan

KLA 6100 Surfscan film inspection system refurbished

SPECIFICATIONS
  • Capable of 2" -4" or 4" - 8" wafers. (To run 2 - 4 inch, order custom option.)
  • Configured for customer cassettes.
  • Non-patterned surface Inspection System.
  • 0.002 parts per million, Haze Resolution.
  • Detection: 0.16 um @ 95% capture rate based on PSL NIST Calibration Standard.
  • Accuracy within 2% based on Approved Calibration Standard.
  • Refurbished tool.
  • Win 98 software, Tencor current software.
  • New Color Display Monitor.
  • NIST Calibrated to Silicon substrate.
  • Full Calibration data package.
  • New Data Printer.
  • Lock Down accessories.
  • Memory, CPU, Hard Drive upgrade.
  • Tencor approved blower assembly.
  • USA Shipping Crate
  • Network ready.
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