KLA 6200 SURFSCAN REFURBISHED

System Specifications:

• Capable of 2" -8" wafers.
• Currently configured for 200mm wafers, PA-172 Cassettes.
• Non-patterned surface Inspection System.
• 0.09 micron Defect Sensitivity @ 80% capture, based on PSL Standards.
• 0.02 ppm Haze Sensitivity.
• 0.002 ppm Haze Resolution.
• Accuracy within 1%.
• XY coordinates.
• Refurbished to OEM specifications.
• Including Win 98 software, CD ROM Writer.
• New Argon Ion laser.
• NIST Calibrated.
• Full Calibration data package.
• New Data Printer.
• Manuals.
• Lock Down accessories.
• Memory, CPU, Hard Drive upgrade.
• Tencor approved blower assembly.
• USA Shipping Crate.
• Warranty: 60 day parts, CCM and Wafer puck not included.