KLA 6420 Surfscan

KLA 6420 Surfscan Film Inspection System refurbished

SPECIFICATIONS
  • Capable of 2" -8" wafers.
  • Low angle optics.
  • Currently configured for 200mm wafers, PA-182 Cassettes.
  • Non-patterned surface Inspection System.
  • 0.12 micron Defect Sensitivity @ 95% capture, based on PLS Standards.
  • Accuracy within 1%.
  • XY coordinates.
  • Refurbished to OEM specifications.
  • Including Win 98 software, CD ROM Writer.
  • New Argon Ion laser.
  • NIST Calibrated.
  • Full Calibration data package.
  • New Data Printer.
  • Lock Down accessories.
  • Memory, CPU, Hard Drive upgrade.
  • Tencor approved blower assembly.
  • USA Shipping Crate
  • Network ready
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