KLA-TENCOR FLEXUS 2320 DUAL WAVE LENGTH TOOL THIN FILM STRESS MEASUREMENT SYSTEM

Remanufactured in 2003, fully operational with Calibration Data Test Package!

Serial#: 0398-4661

System Specifications:

• Dual Wave length tool
• Remanufactured, fully operational with Calibration Data Test Package
• Capable of scanning 75 mm-200mm wafers with optional plates
• 200 mm plate is included
• Scanning diode laser source.
• Hot plate option - up to 500 degrees
• Printer
• Computer, Color monitor, hard drive backup
• Operator, Service manuals included