KLA-TENCOR P-11 LONG SCAN SURFACE PROFILER

Computerized, highly sensitive Surface Profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications.

It features the ability to measure micro-roughness with up to 0.5Å (0.002 min.) resolution over short distances as well as waviness over a full, 205-mm (8.1-in.) scan.

The built-in PC computing power offers precise, automatic measurement capability with the convenience and ease of use of Microsoft Windows-based software control and data analysis.

The KLA-Tencor P-11 can profile a variety of materials, including

• Semiconductor wafers
• Thin-film heads
• Precision-machined and polished surfaces
• Ceramics for micro-electronics
• Glass for flat panel displays
• Optical surfaces

Features:

• Measurement of vertical features ranging from under 100Å (0.4 min.) to approximately 300 µm (11 mils), with a vertical resolution of 0.5, 2, or 10Å. Vertical range for the optional Extended Range MicroHead xr is from under 100Å to 1000mm with 1-, 10-, or 80-Å resolution; for the optional Low-Force MicroHead, from under 50Å to 130 mm at 0.5-, 2-, and 10-Å resolution.
• Photo-realistic rendering of the scan data in three dimensions for extended surface analysis.
• A virtually unlimited number of data points per profile guarantee that the horizontal resolution is limited by the stylus radius and not by the number of data points.
• Automatic computation of the average, maximum and center stress of surface films in MPa for enhanced yield.
• Measurement of many roughness and waviness parameters, with user-selectable cutoff filters to isolate roughness and waviness.
• Ability to fit and level a scan, allowing accurate step height measurements on curved surfaces.
• Ability to detect the edge or apex of a profile feature, allowing automated data analysis relative to the feature.
• Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.