KLA-Tencor P-11 long scan surface profiler

KLA-Tencor P-11 long scan surface profiler

SPECIFICATIONS

Computerized, highly sensitive Surface Profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications.

It features the ability to measure micro-roughness with up to 0.5Å (0.002 min.) resolution over short distances as well as waviness over a full, 205-mm (8.1-in.) scan.

The built-in PC computing power offers precise, automatic measurement capability with the convenience and ease of use of Microsoft Windows-based software control and data analysis.

The KLA-Tencor P-11 can profile a variety of materials, including

  • Semiconductor wafers
  • Thin-film heads
  • Precision-machined and polished surfaces
  • Ceramics for micro-electronics
  • Glass for flat panel displays
  • Optical surfaces
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