KLA-Tencor P-11 long scan surface profiler features

KLA-Tencor P-11 long scan surface profiler

FEATURES

Measurement of vertical features ranging from under 100Å (0.4 min.) to approximately 300 µm (11 mils), with a vertical resolution of 0.5, 2, or 10Å. Vertical range for the optional Extended Range MicroHead xr is from under 100Å to 1000mm with 1-, 10-, or 80-Å resolution; for the optional Low-Force MicroHead, from under 50Å to 130 mm at 0.5-, 2-, and 10-Å resolution.
Photo-realistic rendering of the scan data in three dimensions for extended surface analysis.
A virtually unlimited number of data points per profile guarantee that the horizontal resolution is limited by the stylus radius and not by the number of data points.
Automatic computation of the average, maximum and center stress of surface films in MPa for enhanced yield.
Measurement of many roughness and waviness parameters, with user-selectable cutoff filters to isolate roughness and waviness.
Ability to fit and level a scan, allowing accurate step height measurements on curved surfaces.
Ability to detect the edge or apex of a profile feature, allowing automated data analysis relative to the feature.
Ability to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.