Obsolete Tencor and Surfscan Parts

As you may be aware, Tencor will obsolete some Surfscan models by the end of this year.

Brumley South, Inc. has been supporting this equipment for years and will provide you with the parts, parts repair or exchange for the following Tencor and KLA Surfscan inspection equipment models:

• 100
• 164
• 364
• 3000
• 4000
• 4500
• 5000
• 5500
• 6100
• 6200
• 6220
• 6400
• 6420
• 7000
• 7200
• 7400
• 7500
• 7600
• 7700
• AIT-1
• Prometrix series
• UV-1050
• CD SEM 8100 Source heads
• RS-100
• RS-50
• RS-75
• SM-200
• Tencor Alpha-Step 200
• Tencor Alpha-Step 250
• Tencor Alpha-Step 500

Even if you don't see your equipment model number on the list above, e-mail us and we will do our best to find the best solution for your problem!

Would you like to exchange your old, bad circuit board for a newly refurbished one? Then send it to us!

All Tencor parts are cleanroom tested and come with 90-Day Warranty.

We can, also refurbish your complete Tencor system back to the factory specifications.

For an immediate e-mail response and list of available parts, please, fill out the form: