ESTEK WIS-600 REFURBISHED

System Specifications:

• Dark and light channel system. Dark channel is used for detecting particles and any light scattering defects. Light channel is useful for detecting non-light scattering defects such as mounds, dimples and non uniformity. Detects specular flaws, including large particles, mounds, dimples, saw marks, grooves, fractures, slip, epi-spikes, small particles on large grained surfaces, particles buried in/under a film.
• Detection 0.30 um or .20 um(optional) on Silicon at 95% capture rate. Verified by NIST Traceable Standards.
• Remanufactured System to factory production specifications.
• NIST Calibration.
• Warranty 180 days, Parts and labor. Travel Expense not included.
• Automatic cassette-to-cassette robotic wafer transport system.
• 150 mm non-contaminating robotic wafer handling system with sorting capability.
• Wis-600A model/ includes two random access indexers . Wafers per hour, 120.
• Wis-600B model/ includes one random access indexer and 2 receive indexers . Wafers per hour, 360.
• Wis-600C model/ includes two random access indexers and 4 receive indexers. Wafers per hour, 360.
• Configured to run Fluoroware PA-72 Series Cassette
• New Color Monitor to display wafers.
• No haze reporting channel.
• Data printer.